A Capacitive Pressure Sensor Based on Cofirable Ceramic/Glass Materials with LTCC Technology
نویسندگان
چکیده
منابع مشابه
A Textile Based Capacitive Pressure Sensor
Background. As interest on wearable computing [1] increases, researchers are looking for new materials to use as a support for electronics. A fabric substrate is very appealing: it is elastic and extensible [2], supported by a well known technology and produced at low-cost. State of the art. Some smart pressure-sensors interfacing with a flexible substrate have been developed, but they are eith...
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In this paper, a novel capacitance pressure sensor based on Low-Temperature Co-Fired Ceramic (LTCC) technology is proposed for pressure measurement. This approach differs from the traditional fabrication process for a LTCC pressure sensor because a 4J33 iron-nickel-cobalt alloy is applied to avoid the collapse of the cavity and to improve the performance of the sensor. Unlike the traditional LT...
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ژورنال
عنوان ژورنال: Journal of Microelectronics and Electronic Packaging
سال: 2019
ISSN: 1551-4897
DOI: 10.4071/imaps.926920